SiC CVD System
SiC CVD System
A process system designed for stable deposition and growth of SiC materials through high-temperature CVD processes.
- Materials
- SUS 304, SUS 316
- 1 Axis
- Φ1,005mm / Max Rings: 30EA
- 5 Axis
- Φ1,660mm / Max Rings: 150EA
- 7 Axis
- Φ1,900mm / Max Rings: 210EA