SiC CVD System

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SiC CVD System
SiC CVD System
SiC CVD System
SiC CVD System
SiC CVD System
SiC CVD System
SiC CVD System

SiC CVD System

A process system designed for stable deposition and growth of SiC materials through high-temperature CVD processes.
Materials
SUS 304, SUS 316
1 Axis
Φ1,005mm / Max Rings: 30EA
5 Axis
Φ1,660mm / Max Rings: 150EA
7 Axis
Φ1,900mm / Max Rings: 210EA

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