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From design to installation—
The future of semiconductors shaped by precision.

FTL perfects customer processes through
precision vacuum chamber technology.

We translate process requirements into design
and bring them to life through equipment.

PRODUCTS

Explore FTL’s product technologies.

SiC CVD System

A process system designed for stable deposition and growth of SiC materials through high-temperature CVD processes.

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SiC CVD System

Roll to Roll Chamber

A Roll-to-Roll vacuum chamber designed for continuous coating and deposition processes on films and flexible materials.

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Roll to Roll Chamber

10.5G 11th Buffer Chamber-35ToN

A vacuum buffer chamber designed for the stable holding, storage, and transfer of substrates during OLED manufacturing processes.

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10.5G 11th Buffer Chamber-35ToN

TM Chamber

A Transfer Module Chamber designed for the precise transfer of substrates between process chambers under vacuum conditions.

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TM Chamber

CVD Chamber

A vacuum process chamber designed to ensure stable CVD processing for thin-film deposition.

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CVD Chamber

LL Chamber

A Load Lock Chamber designed for substrate loading and unloading between atmospheric and vacuum process environments.

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LL Chamber

PI Oven Chamber

An oven chamber designed for the heat treatment and curing of PI materials in OLED manufacturing processes.

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PI Oven Chamber

Transfer Chamber

A chamber designed to reliably transfer substrates between process sections while maintaining vacuum conditions.

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Transfer Chamber

Inline Chamber

An inline chamber designed to support smooth substrate transfer and seamless process integration in continuous production lines.

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Inline Chamber

Backing Chamber

A vacuum chamber designed to support substrate processing and backside processes in OLED manufacturing.

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Backing Chamber

Panel Transfer System

An automated system designed for the safe and precise transfer of large display panels between process stages.

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Panel Transfer System

COMPANY

A total solution partner for design, manufacturing, installation, and commissioning

Company

FTL, dedicated to
vacuum chamber technology

Core Competency

FTL’s one-stop engineering
capability for high performance

Inquiry

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lead time, and custom design

Archive

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